Detail Specifications / Descriptions
PV-3015/ PV-3015E
Stage size (mm)：340 x 152
Glass table size (mm)：196 x 96
X-axis travel (mm)：150
Y-axis travel (mm)：50
Z-axis travel (mm)：90 (for focusing)
Measuring accuracy (μm)：3.0 + L/75 L: measuring length (mm)
Resolution (X/Y-axis)：0.001 mm (1μm) or 0.0005 mm (0.5μm)